Single atom gas field ion sources for scanning ion microscopy

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DOIResolve DOI: http://doi.org/10.1007/978-3-319-41990-9_2
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TypeBook Chapter
Book titleHelium Ion Microscopy
Series titleNanoScience and Technology
ISSN1434-4904
2197-7127
ISBN978-3-319-41988-6
978-3-319-41990-9
Pages3161
Abstract
Publication date
LanguageEnglish
AffiliationNational Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NPARC number23000868
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Record identifierf38d8ea3-4d6d-42e3-9abc-8bc2e614daae
Record created2016-10-26
Record modified2016-10-26
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