Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses

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DOIResolve DOI: http://doi.org/10.1016/S0169-4332(99)00331-1
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TypeArticle
Journal titleApplied Surface Science
ISSN0169-4332
Volume152
Issue3
Pages138148; # of pages: 11
SubjectDrilling; Laser ablation; Mathematical models; Micromachining; Pulsed laser applications; Solid state lasers; Ultrafast phenomena; Laser parameters; Metal foil
Abstract
Publication date
PublisherElsevier
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for National Measurement Standards; Security and Disruptive Technologies; Automotive and Surface Transportation
Peer reviewedYes
NPARC number21276188
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Record identifierd909edcd-4fbc-406d-99a6-fdb0a347e3d1
Record created2015-09-28
Record modified2016-05-09
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