Three dimensional accurate morphology measurements of polystyrene standard particles on silicon substrate by electron tomography

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DOIResolve DOI: http://doi.org/10.1016/j.micron.2015.08.003
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TypeArticle
Journal titleMicron
ISSN0968-4328
Volume79
Pages5358
Subjectelectron tomography; (scanning) transmission electron microscopy ((S)TEM); polystyrene latex spheres; calibration sample; metrology; accurate shape measurement; surface energy; nanoparticle deformation; quantitative electron tomography
Abstract
Publication date
PublisherElsevier
LanguageEnglish
AffiliationNational Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NPARC number23001698
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Record identifiercc54dc45-2a52-4463-b4ca-abe279bd86de
Record created2017-03-20
Record modified2017-03-20
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