Structure of Hafnium silicate films formed by atomic layer deposition

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DOIResolve DOI: http://doi.org/10.1149/1.3206616
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TypeArticle
Journal titleECS Transactions
ISSN1938-5862
1938-6737
Volume25
Issue6
Pages163172; # of pages: 10
Abstract
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number21276871
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Record identifiercb2f666e-e529-4ec1-91b3-b0a0c3877302
Record created2015-10-27
Record modified2016-05-09
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