Preparation and characterization of pulsed laser deposition (PLD) SiC films

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DOIResolve DOI: http://doi.org/10.1016/j.apsusc.2005.05.031
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TypeArticle
Journal titleApplied Surface Science
ISSN0169-4332
Volume252
Issue10
Pages33863389; # of pages: 4
SubjectPulsed laser deposition; SiC film; Si K-edge
Abstract
Publication date
LanguageEnglish
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NPARC number21275995
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Record identifier9ea70817-512b-4462-9dc6-9f79461dcfa2
Record created2015-09-04
Record modified2016-05-09
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