Formation of chemically clean and morphologically smooth PtSi/Si interfaces

DOIResolve DOI: http://doi.org/10.1557/PROC-318-129
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TypeArticle
Proceedings titleInterface control of electrical, chemical, and mechanical properties: symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Series titleMaterials Research Society Symposia Proceedings; no. 318
Conference1993 MRS Fall Meeting, Symposium Ca: Interface Control of Electrical, Chemical, and Mechanical Properties, November 29 - December 3, 1993, Boston, Massachusetts, U.S.A.
ISBN9781558992177
Abstract
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PublisherMaterials Research Society
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number21276804
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Record identifier7a06ff56-bb9e-44b7-a91d-2082550fee74
Record created2015-10-20
Record modified2016-05-09
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