Evaluation of electron tomography reconstruction methods for interface roughness measurement

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DOIResolve DOI: http://doi.org/10.1002/jemt.23006
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EditorSearch for: Verkade, Paul
TypeArticle
Journal titleMicroscopy Research and Technique
ISSN1059-910X
1097-0029
Subjectburied interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices
Abstract
Publication date
PublisherWiley
LanguageEnglish
AffiliationNanotechnology; National Research Council Canada
Peer reviewedYes
NPARC number23002836
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Record identifier397db106-39cc-4754-9031-903da3bda758
Record created2018-03-09
Record modified2018-10-31
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