Influence of laser parameters and material properties on micro drilling with femtosecond laser pulses

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DOIResolve DOI: http://doi.org/10.1007/s003390051418
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TypeArticle
Journal titleApplied Physics A: Materials Science and Processing
ISSN0947-8396
Volume69
Issue7
PagesS367S371
Abstract
Publication date
PublisherSpringer International Publishing
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for National Measurement Standards; Security and Disruptive Technologies
Peer reviewedYes
NPARC number21276235
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Record identifier32501c02-ff0c-41c9-b72d-759167126991
Record created2015-09-28
Record modified2016-05-09
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