DOI | Trouver le DOI : https://doi.org/10.1016/0040-6090(92)90040-I |
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Auteur | Rechercher : Hulse, John1; Rechercher : Rowell, Nelson1; Rechercher : Noël, J.-P.1; Rechercher : Rolfe, Stephen1 |
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Affiliation | - Conseil national de recherches du Canada. Institut des étalons nationaux de mesure du CNRC
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Format | Texte, Article |
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Conférence | European Materials Research Society 1992 Sring Conference, Symposium A: SiGe Based Technologies, 2-4 June 1992, Strasbourg, France |
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Résumé | Two SiGe multiple quantum well structures that had been characterized already by double-crystal X-ray diffraction (DCXRD) have been examined by spectroscopic ellipsometry (SE) and photoluminescence (PL). Analysis of the SE measurements was based upon the nominal growth conditions rather than the DCXRD findings. This analysis was able to provide the thicknesses and compositions of the layers comprising the heterostructure easily and quickly. Moreover, the SE analysis also provided estimates of the variation in these thicknesses and compositions, as well as in the heterostructure periodicity. It was found that the SE results confirm and enhance the DCXRD findings. The interpretation of the PL spectra benefits from the SE characterization and illuminates the nature of the small uncertainties in composition and layer thickness found by SE. These results demonstrate that SE provides a quick, extensive and reliable post mortem analysis of such materials. |
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Date de publication | 1992-12-20 |
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Dans | |
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Langue | anglais |
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Numéro du CNRC | NRC-INMS-1119 |
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Numéro NPARC | 8897418 |
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Exporter la notice | Exporter en format RIS |
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Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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Identificateur de l’enregistrement | 9d91393b-1d4c-4ba1-96ca-1f887d7872cc |
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Enregistrement créé | 2009-04-22 |
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Enregistrement modifié | 2020-04-24 |
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