| DOI | Trouver le DOI : https://doi.org/10.4028/www.scientific.net/MSF.173-174.73 |
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| Auteur | Rechercher : Dubowski, J. J.1 |
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| Éditeur | Rechercher : Briege, M.; Rechercher : Dittrich, H.; Rechercher : Klose, M.; Rechercher : Schock, H.W.; Rechercher : Werner, J. |
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| Affiliation | - Conseil national de recherches du Canada. Institut des sciences des microstructures du CNRC
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| Format | Texte, Article |
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| Conférence | First International Symposium on Semiconductor Processing and Characterization with Lasers: Applications in Photovoltaics, April 1994, Stuttgart, Germany |
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| Résumé | The results of pulsed laser ablation are reviewed with a focus on the feasibility of this approach for atomic level processing. We have developed a pulsed laser evaporation and epitaxy (PLEE) method, with two lasers used for simultaneous or sequential ablation of different targets, for the deposition of quantum wells and superlattices of some II-VI semiconductor materials. The unique potential of PLEE exists in bandgap engineering of ternary structures with an arbitrarily changing chemical composition. Another new and rapidly developing application of pulsed laser ablation is low-fluence laser etching. We have been exploring this approach with a laser-assisted dry etching ablation (LADEA) system for the microfabrication of various structures in materials viable for advanced microelectronics and optoelectronics. Using InP it has been demonstrated that the process of material removal can be carried out at rates well below one atomic layer per UV excimer laser pulse. An investigation of the surface morphology of LADEA-processed material indicates the feasibility of the method in achieving an atomic level control. |
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| Date de publication | 1995 |
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| Dans | |
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| Langue | anglais |
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| Numéro NPARC | 12328053 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 948f0971-6446-4589-93d1-6aafcc0fd71e |
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| Enregistrement créé | 2009-09-10 |
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| Enregistrement modifié | 2020-04-29 |
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