| Téléchargement | - Voir la version finale : Sealing SU-8 microfluidic channels using PDMS (PDF, 928 Kio)
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| DOI | Trouver le DOI : https://doi.org/10.1063/1.3659016 |
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| Auteur | Rechercher : Zhang, Zhiyi1; Rechercher : Zhao, Ping1; Rechercher : Xiao, Gaozhi1; Rechercher : Watts, Benjamin R.; Rechercher : Xu, Changqing |
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| Affiliation | - Conseil national de recherches du Canada. Institut des sciences des microstructures du CNRC
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| Format | Texte, Article |
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| Résumé | A simple method of irreversibly sealing SU-8 microfluidic channels using PDMS is reported in this paper. The method is based on inducing a chemical reaction between PDMS and SU-8 by first generating amino groups on PDMS surface using N2 plasma treatment, then allowing the amino groups to react with the residual epoxy groups on SU-8 surface at an elevated temperature. The N2 plasma treatment of PDMS can be conducted using an ordinary plasma chamber and high purity N2, while the residual epoxy groups on SU-8 surface can be preserved by post-exposure baking SU-8 at a temperature no higher than 95 oC. The resultant chemical bonding between PDMS and SU-8 using the method create an interface that can withstand a stress that is greater than the bulk strength of PDMS. The bond is permanent and is long-term resistant to water. The method was applied in fabricating SU-8 microfluidi-photonic integrated devices, and the obtained devices were tested to show desirable performance. |
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| Date de publication | 2011-11-09 |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro NPARC | 18914966 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 6487460f-52a5-4d16-9905-a121de83c7d8 |
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| Enregistrement créé | 2011-11-23 |
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| Enregistrement modifié | 2020-05-27 |
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