Auteur | Rechercher : Li, Chengde1; Rechercher : Lee, Seongkuk1; Rechercher : Nikumb, Suwas1 |
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Affiliation | - Conseil national de recherches du Canada. Institut des matériaux industriels du CNRC
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Format | Texte, Rapport technique |
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Description physique | 20 p.: ill. |
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Sujet | Al2O3; femtosecond laser; via holes drilling |
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Résumé | The topography, radial spreading and chemical composition of the slag produced during percussion and trepanning hole drilling process using femtosecond laser have been investigated. Results on optical microscopy, electron scanning microscopy and energy dispersion spectroscopy analysis are presented. While there is no significant difference in the average ablation rate between the near IR femtosecond laser in comparison to the UV nanosecond laser ablation of Al2O3 ceramics, near IR femtosecond laser provides better precision and quality. Absence of particulates due to resolidification of molten material around the hole was also observed. The slag consisted of ultrafind powder formed by the condensation of the supersaturated ablation plume. This slag can easily be removed using ultrasonic bath with the mixture of acetone and water. Combining the trepanning hole drilling method, femtosecond laser opens up a new door for production of high precision micro via holes in alumina wafers. |
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Date de publication | 2008 |
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Maison d’édition | National Research Council of Canada. Industrial Materials Institute |
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Série | |
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Langue | anglais |
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Numéro du CNRC | NRCC 49166 |
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Numéro NPARC | 21274374 |
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Exporter la notice | Exporter en format RIS |
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Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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Identificateur de l’enregistrement | 06125714-ba19-4245-93f7-b378529755f7 |
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Enregistrement créé | 2015-03-11 |
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Enregistrement modifié | 2022-09-13 |
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