Thermal Leakage Improvement by Using a High-Work-Function Ni Electrode in High-k TiHfO Metal-Insulator-Metal Capacitors

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1149/1.2422874
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number12744039
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Record identifierfee36cb4-aeee-4fa7-b31b-6696b5965f76
Record created2009-10-27
Record modified2020-05-10
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