A new approach to imaging systems incorporating chemical amplification: Synthesis and preliminary evaluation of novel resists based on tertiary copolycarbonates

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NRC numberFRCHET1986A
NPARC number9365403
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Record identifierfc0d2549-ac90-4d26-84f1-df172f7481d8
Record created2009-07-10
Record modified2020-03-17
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