| Abstract | Nanoimprint lithography was combined with glancing angle deposition (GLAD) of titanium dioxide to fabricate a square spiral columnar film with a bandgap in the visible spectral range. Nanoimprint stamps were fabricated with seed spacing ranging from 80 to 400 nm, and four periods of square spiral film were deposited on top of the 320 nm array of seeds. The ratio of lattice spacing, vertical pitch and spiral arm swing was chosen as a : P : A = 1 : 1.35 : 0.7 and the deposition angle was fixed at 86° to maximize the square spiral film’s bandgap.Reflectivity measurements show that the fabricated structure exhibit a pseudo-gap centered at around 600 nm wavelength, in good agreement with finite difference electromagnetic simulations. The absence of a full 3D bandgap is due the deviation of GLAD columns’ cross-section from the optimal one, which has to be highly elongated in the deposition plane. However, simulations show that a geometry close to the fabricated one will produce a full 3D bandgap, if the structure is inverted. The material refractive index in such an inverted photonic crystal can be as low as n = 2.15. |
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