An integrated shadow-mask based on a stack of inorganic insulators for high-resolution OLEDs using evaporated or spun-on materials

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Proceedings titleSynthetic Metals
ConferenceE-MRS 2000 Spring Meeting, Symposium I, 30 May–2 June 2000, Strasbourg, France
Pages225227; # of pages: 3
AbstractWhile organic materials show impressive performances as electroluminescent diodes, their integration in a passive matrix to form a high-resolution display is a challenge. The anode can easily be patterned in columns prior to the deposition of organic materials, but conventional microfabrication techniques cannot be used to etch the cathode on top because organics are affected by treatments applied to photosensitive resins. We microfabricated an integrated shadow-mask with openings in rows orthogonal to the columns of the anode. The mask has an overhanging edge so that the cathode evaporated on top is discontinuous at its edges, thereby separating the diodes along rows. The mask is composed of a stack of inorganic insulators all deposited in a commercial plasma-enhanced chemical vapor deposition tool, and whose different etching rates in hydrofluoridric acid enable to obtain the overhang in one lithographic step. The process is very simple, as high resolution as microfabrication can provide, and the resulting device is less prone to short-circuits than when a lift-off photoresist is used. Pixellation is reported both from evaporated small molecules and spun-on polymers.
Publication date
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12743994
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Record identifierf8fb279b-4000-4312-8b2a-eebe0b7ce173
Record created2009-10-27
Record modified2016-05-09
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