X-ray photoelectron spectroscopic study of KrF excimer laser nitrided InP surface

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.1412837
AuthorSearch for: ; Search for: ; Search for: ; Search for: 1; Search for: ; Search for:
Affiliation
  1. National Research Council of Canada. NRC Institute for Chemical Process and Environmental Technology
FormatText, Article
Publication date
In
LanguageEnglish
Peer reviewedYes
NPARC number12744166
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifiere5575492-2c6f-4587-966f-cc8d8dabb393
Record created2009-10-27
Record modified2023-04-17
Date modified: