Microgripper: design, finite element analysis and laser microfabrication

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DOIResolve DOI: http://doi.org/10.1109/ICMENS.2003.1222015
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Proceedings titleProceedings of the 2003 International Conference on MEMS, NANO and Smart Systems
ConferenceInternational Conference on MEMS, NANO and Smart Systems (ICMENS 2003), July 20-23, Banff, Canada
Pages308313; # of pages: 6
Subjectfinite element analysis; grippers; nickel
AbstractThis research is focused on new and innovative design, finite element analysis, precision laser microfabrication, and performance evaluation of a microgripper. The design of the microgripper with overall dimension of 1.4(W)x2.8(L)mm is based on a pair of cascaded structures oriented in a face-to-face direction, to act as microtweezers. Each cascaded structure is formed by connecting several basic actuation units in series. Each actuation unit consists of a constrainer and two semi-circular-shaped actuation beams. The actuation principle is based on the electrothermal effect. On application of electrical potential, the output displacement and the force are generated from the summation of all basic actuation units in these cascaded structures. Finite element analysis (FEA) is applied to simulate dynamic performance of the microgripper and to choose proper operational voltage parameters. Thin nickel foil of a thickness of 12.5 micrometers was used in the laser microfabrication of these prototypes. Dynamic performance of the prototype device was evaluated within 0-1.9 voltage range. The maximum tweezing displacements of up to 30 micrometers were recorded for nickel microgripper prototype. Larger displacements are feasible through the optimization of design parameters.
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NPARC number21272536
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Record identifiere4a0e24c-c25b-4f35-b49a-e99982d6b52d
Record created2014-12-02
Record modified2016-05-09
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