Characterization of (100)InP after surface passivation as studied by AFM, XPS and SIMS
Characterization of (100)InP after surface passivation as studied by AFM, XPS and SIMS
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Affiliation |
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Format | Text, Article |
Conference | ECS/ESSDERC Symposium on Analytical Techniques for Semiconductor Materials and Process Characterization II, 1995 |
Publication date | 1995 |
In | |
Language | English |
NPARC number | 12338196 |
Export citation | Export as RIS |
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Record identifier | deaec3ed-0594-40eb-93cb-b342046687c1 |
Record created | 2009-09-10 |
Record modified | 2020-04-29 |
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