Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators
Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators
Format | Text, Article |
---|---|
Publication date | 2007 |
In | |
Peer reviewed | Yes |
NRC number | 327 |
NPARC number | 8926073 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | de4b241d-1c47-4b74-bb11-b7a8afbe0b0e |
Record created | 2009-04-23 |
Record modified | 2020-05-10 |
- Date modified: