Pattern Replication of 100 nm to Millimeter-Scale Features by Thermal Nanoimprint Lithography

From National Research Council Canada

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  1. National Research Council of Canada. NRC Industrial Materials Institute
FormatText, Article
ConferenceThe 1st International Conference on Micro- and Nano-Technology (Viennano ’05), Vienna, Austria, March 09-11, 2005
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LanguageEnglish
Peer reviewedNo
NRC numberNRCC 48971
NPARC number15966890
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Record identifierda483fb4-363a-4d29-8162-aa5d77d4260d
Record created2010-11-02
Record modified2020-04-07
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