Onset of shadowing-dominated growth in glancing angle deposition

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.2794420
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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LanguageEnglish
Peer reviewedYes
NPARC number12744570
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Record identifierd831bd40-7588-4a24-928f-1b743d929324
Record created2009-10-27
Record modified2023-05-10
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