Thermal stability of platinum silicide insub-micron lines

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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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Conference1995 MRS Fall Meeting, Symposium on Materials reliability issues in microelectronics V, San Francisco, California, USA, April 17-21, 1995
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LanguageEnglish
NPARC number12338466
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Record identifierd55688eb-7fbc-4fbe-9d5d-b5dea48d63e4
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