Author | Search for: Ma, Penghui1; Search for: Verly, Pierre1; Search for: Dobrowolski, J.; Search for: Lin, Fengchen1 |
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Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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Format | Text, Article |
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Conference | The 46th Annual Technical Conference |
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Publication date | 2003 |
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Publisher | Society of Vacuum Coaters |
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In | |
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NPARC number | 12346727 |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | d3188d75-f2c1-4ee1-9647-63f233861fd9 |
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Record created | 2009-09-17 |
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Record modified | 2021-01-11 |
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