Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications
Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications
Format | Text, Article |
---|---|
Publication date | 2008 |
In | |
Peer reviewed | Yes |
NRC number | 471 |
NPARC number | 8926526 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | d232f6ad-fd96-4b2f-a577-45572f37e740 |
Record created | 2009-04-23 |
Record modified | 2020-04-15 |
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