Electrostatic actuator with liquid metal-elastomer compliant electrodes used for on-chip microvalving

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1088/0960-1317/22/9/097001
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FormatText, Article
SubjectCompliant electrodes; Elastomeric membranes; Flexible electrodes; Gas channels; Micro valves; On chips; Liquid metals; Valves (mechanical); Electrostatic actuators
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LanguageEnglish
Peer reviewedYes
NRC publication
This is a non-NRC publication

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NPARC number21270228
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Record identifiercfa7b48d-2b0a-4b25-9f44-45ecd31597f6
Record created2014-01-14
Record modified2020-04-21
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