Electrostatic actuator with liquid metal-elastomer compliant electrodes used for on-chip microvalving
Electrostatic actuator with liquid metal-elastomer compliant electrodes used for on-chip microvalving
DOI | Resolve DOI: https://doi.org/10.1088/0960-1317/22/9/097001 |
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Author | Search for: ; Search for: ; Search for: |
Format | Text, Article |
Subject | Compliant electrodes; Elastomeric membranes; Flexible electrodes; Gas channels; Micro valves; On chips; Liquid metals; Valves (mechanical); Electrostatic actuators |
Abstract | |
Publication date | 2012 |
In | |
Language | English |
Peer reviewed | Yes |
NRC publication | This is a non-NRC publication"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC. |
NPARC number | 21270228 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | cfa7b48d-2b0a-4b25-9f44-45ecd31597f6 |
Record created | 2014-01-14 |
Record modified | 2020-04-21 |
- Date modified: