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Fabrication of out-of-plane micro-mirrors in silicon-on-insulator planar waveguides

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.2186656
AuthorSearch for: 1; Search for: 1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: 1; Search for: 1; Search for: 1; Search for: 1
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Journal of Vacuum Science & Technology A 24, no. 3: 718–722.
LanguageEnglish
Peer reviewedYes
NPARC number12744830
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Record identifiercf6917d1-4ce7-4d7f-8a6e-4ee58aca2f96
Record created2009-10-27
Record modified2020-04-22
Date modified: