Download | - View accepted manuscript: Integrated high temperature longitudinal, shear and plate acoustic wave transducers (PDF, 1.1 MiB)
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DOI | Resolve DOI: https://doi.org/10.1143/JJAP.46.4688 |
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Author | Search for: Kobayashi, Makiko1; Search for: Jen, Cheng-Kuei1; Search for: Ono, Yuu1; Search for: Wu, Kuo-Ting; Search for: Shih, Ishang |
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Affiliation | - National Research Council of Canada. NRC Industrial Materials Institute
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Format | Text, Article |
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Subject | High temperature ultrasonic measurement; Rayleigh wave transducer; Lamb wave transducer; longitudinal wave transducer; shear wave transducer; interdigital transducer; integrated ultrasonic transducer; nondestructive testing |
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Abstract | Thick (>40µm) ceramic films as piezoelectric ultrasonic transducers (UTs) have been successfully deposited on metallic substrates by a spray technique. In the film fabrication a composite consisting of piezoelectric powders well mixed with solution of high dielectric constant is directly sprayed onto the substrate. It is then dried, fired or annealed by heat. Multiple coating is used to achieve desired film thicknesses. A corona poling is utilized to achieve the piezoelectricity of the film. The top electrode is accomplished by painting, spray coating, or vacuum evaporation of appropriate electrode materials. All fabrication processes can be carried out on-site and by handheld devices. Integrated ultrasonic longitudinal, shear, and plate wave transducers have been made. These transducers have been tested and operated at 350°C. |
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Publication date | 2007-07-26 |
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In | |
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Language | English |
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Peer reviewed | Yes |
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NRC number | NRCC 48957 |
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NPARC number | 15775000 |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | bb9ca51b-6cba-4a24-be81-777617976a64 |
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Record created | 2010-07-06 |
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Record modified | 2020-05-10 |
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