Characterization of Gd2O3 films deposited on Si100 by e-beam evaporation from pressed-powder targets

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Institute for National Measurement Standards
FormatText, Article
Conference15th Symposium on Low and High Dielctric Constant Mateirals: Materials Science, Processing, and Reliability Issues, May 2000, Toronto
NPARC number12346325
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Record identifieraec0d541-acbe-4bc9-aa15-bd06f6befc88
Record created2009-09-17
Record modified2020-04-16
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