Physics and Technology of High-k Gate Dielectrics 5
Physics and Technology of High-k Gate Dielectrics 5
Editor | Search for: Iwai, H.; Search for: Kar, S.; Search for: De Gendt, S.; Search for: Houssa, M.; Search for: Landheer, Dolf1; Search for: Misra, D. |
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Affiliation |
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Format | Text, Book Chapter |
Publisher | The Electrochemical Society |
Place | Pennington, NJ |
In | |
NPARC number | 12346786 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | a10c0451-ed7d-4b2d-953d-157d26c06c52 |
Record created | 2009-09-17 |
Record modified | 2020-03-03 |
- Date modified: