| Alternative title | Silicon Nitride and Silicon Dioxide Thin Films VII |
|---|
| Author | Search for: Botton, G.; Search for: Romain, E.; Search for: Landheer, Dolf1; Search for: Wu, X.; Search for: Wu, M-Y; Search for: Lee, M.; Search for: Lu, Z-H |
|---|
| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
|
|---|
| Format | Text, Article |
|---|
| Conference | Spring ECS Meeting, March 23-April 1, 2003, Paris, France |
|---|
| NPARC number | 12346215 |
|---|
| Export citation | Export as RIS |
|---|
| Report a correction | Report a correction (opens in a new tab) |
|---|
| Record identifier | 9dcca308-697d-453c-afdd-1f78b51a0bef |
|---|
| Record created | 2009-09-17 |
|---|
| Record modified | 2020-04-16 |
|---|
