Synthesis of amorphous silicon carbonitride films by pulsed laser deposition

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0040-6090(01)01673-X
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Institute for National Measurement Standards
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NPARC number12743923
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Record identifier9d2e3fd0-565f-4390-9d85-36162be86bfd
Record created2009-10-27
Record modified2020-03-30
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