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Ultra-precision laser micromachining system integrated with piezoelectric motion stage

From National Research Council Canada

AuthorSearch for: 1
Affiliation
  1. National Research Council of Canada. NRC Industrial Materials Institute
FormatText, Article
Conference2004 International Workshop on Advanced Manufacturing Technologies and Integrated Systems, June 2-3, 2004, London ON, Canada
Publication date
In
  • Proceedings of 2004 International Workshop on Advanced Manufacturing Technologies and Integrated Systems (2004).
LanguageEnglish
Peer reviewedYes
IdentifierAMT2004-33
NPARC number21274400
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Record identifier9cc36130-07fc-4c7d-ab6b-dad5a500ed1d
Record created2015-03-11
Record modified2020-04-17
Date modified: