Ultra-precision laser micromachining system integrated with piezoelectric motion stage
Ultra-precision laser micromachining system integrated with piezoelectric motion stage
Author | Search for: 1 |
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Affiliation |
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Format | Text, Article |
Conference | 2004 International Workshop on Advanced Manufacturing Technologies and Integrated Systems, June 2-3, 2004, London ON, Canada |
Publication date | 2004 |
In | |
Language | English |
Peer reviewed | Yes |
Identifier | AMT2004-33 |
NPARC number | 21274400 |
Export citation | Export as RIS |
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Record identifier | 9cc36130-07fc-4c7d-ab6b-dad5a500ed1d |
Record created | 2015-03-11 |
Record modified | 2020-04-17 |
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