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Radiation damage in the TEM and SEM

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/j.micron.2004.02.003
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FormatText, Article
Subjectelectron sputtering; radiation damage; radiolysis; scanning electron microscope; transmission electron microscope
Abstract
We review the various ways in which an electron beam can adversely affect an organic or inorganic sample during examination in an electron microscope. The effects considered are: heating, electrostatic charging, ionization damage (radiolysis), displacement damage, sputtering and hydrocarbon contamination. In each case, strategies to minimise the damage are identified. In the light of recent experimental evidence, we re-examine two common assumptions: that the amount of radiation damage is proportional to the electron dose and is independent of beam diameter; and that the extent of the damage is proportional to the amount of energy deposited in the specimen.
Publication date
In
  • Micron 35, no. 6 (5 March 2004): 399–409.
LanguageEnglish
Peer reviewedYes
NRC publication
This is a non-NRC publication

"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.

NPARC number12338408
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Record identifier97ec4d46-7db6-4aa0-819b-efc254cdb1d7
Record created2009-09-10
Record modified2020-04-17
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