Imaging laser diffractometer for traceable grating pitch calibration

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1088/0957-0233/18/2/S08
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NRC numberNRC-INMS-4040
NPARC number8900416
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Record identifier88041e7b-c9be-4a05-92f5-af5b15f213c2
Record created2009-04-22
Record modified2020-05-10
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