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Residual stress development in UMS TiN coatings

From National Research Council Canada

AuthorSearch for: 1; Search for: 1
Affiliation
  1. National Research Council of Canada. NRC Institute for Aerospace Research
FormatText, Article
ConferenceInternational Conference on Metallurgical Coatings and Thin Films From 5/2/2005 To 5/6/2005, San Diego/ USA
SubjectMagnetron Sputtering; Titanium Nitride; Residual Stress; Microstructural Properties; Mechanical Properties
Access condition
  • available
  • unclassified
  • unlimited
Peer reviewedYes
NRC numberSMPL-2004-0213
NPARC number8932561
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Record identifier83f4e2ed-ff30-4aed-8a2e-c43aa6963c2a
Record created2009-04-23
Record modified2020-04-16
Date modified: