Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites

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LanguageEnglish
Peer reviewedYes
NRC numberNRC-NINT-470
NPARC number8926509
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Record identifier7fcc632a-93ca-4cf8-aeb5-fe88adb07eb7
Record created2009-04-23
Record modified2023-05-10
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