Silicon containing organic-inorganic hybrid materials as EUV photoresists
Silicon containing organic-inorganic hybrid materials as EUV photoresists
| Format | Text, Article |
|---|---|
| Publication date | 2005 |
| In | |
| Peer reviewed | Yes |
| NRC number | 83 |
| NPARC number | 8926414 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 77b15b94-9957-493f-81cd-fb416cfb9e33 |
| Record created | 2009-04-23 |
| Record modified | 2020-04-07 |
- Date modified: