Resist-free deposition of amorphous silicon dioxide from silicon ÃЂÅ¸-diketonates
Resist-free deposition of amorphous silicon dioxide from silicon ÃЂÅ¸-diketonates
| Format | Text, Other |
|---|---|
| NRC number | 81 |
| NPARC number | 8926495 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 71fff383-2334-405b-b1f7-f49ecbacfe78 |
| Record created | 2009-04-23 |
| Record modified | 2020-03-03 |
- Date modified: