Atomic force microscopy and Raman spectroscopy of nanoscale Si/SiO₂ superlattices

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1557/PROC-638-F5.4.1
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EditorSearch for: Lockwood, D. J.1
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceSymposium F – Microcrystaline & Nanocrystalline Semiconductors - 2000
Abstract
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PublisherMaterials Research Society
PlacePittsburgh, Pennsylvania
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LanguageEnglish
NPARC number12346413
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Record identifier6d4ac566-d46b-4300-af88-3e207138c1ce
Record created2009-09-17
Record modified2020-12-14
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