Microstructured Humidity Sensors Fabricated by Glancing Angle Deposition: Characterization and Performance Evaluation
Microstructured Humidity Sensors Fabricated by Glancing Angle Deposition: Characterization and Performance Evaluation
| Format | Text, Article |
|---|---|
| Publication date | 2007 |
| Peer reviewed | Yes |
| NRC number | 425 |
| NPARC number | 8926563 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 68b7175c-5633-4df4-8222-19c5deb03e73 |
| Record created | 2009-04-23 |
| Record modified | 2020-05-10 |
- Date modified: