Low-coherence interferometry – an advanced technique for optical metrology in industry

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DOIResolve DOI: https://doi.org/10.1784/insi.47.4.216.63149
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Affiliation
  1. National Research Council of Canada. NRC Industrial Materials Institute
FormatText, Article
ISSN1354-3296
1354-2575
Abstract
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LanguageEnglish
Peer reviewedYes
NRC numberNRCC 53760
NPARC number15936193
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Record identifier639dcb2c-e3d6-4d7a-84ae-81911216eb80
Record created2010-08-17
Record modified2020-04-07
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