Positron beam study of annealed silicon nitride films

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.361173
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
SubjectANNEALING; CRYSTAL DEFECTS; CVD; HYDROGEN; POSITRON PROBES; SILICON NITRIDES; THIN FILMS; VACANCIES
Abstract
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LanguageEnglish
Peer reviewedYes
NPARC number12333593
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Record identifier5ef3d7e8-5a96-4743-b519-378546538362
Record created2009-09-10
Record modified2020-03-20
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