Growth of vacuum evaporated ultra-porous silicon studied with spectroscopic ellipsometry and scanning electron microscopy

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.1823029
AuthorSearch for: 1; Search for: ; Search for: ; Search for:
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
LanguageEnglish
Peer reviewedYes
NPARC number12743952
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier5a9dd2ce-c4f3-4375-8b26-d10e7a01d892
Record created2009-10-27
Record modified2023-04-17
Date modified: