Growth of vacuum evaporated ultra-porous silicon studied with spectroscopic ellipsometry and scanning electron microscopy
Growth of vacuum evaporated ultra-porous silicon studied with spectroscopic ellipsometry and scanning electron microscopy
DOI | Resolve DOI: https://doi.org/10.1063/1.1823029 |
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Author | Search for: 1; Search for: ; Search for: ; Search for: |
Affiliation |
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Format | Text, Article |
Publication date | 2005 |
In | |
Language | English |
Peer reviewed | Yes |
NPARC number | 12743952 |
Export citation | Export as RIS |
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Record identifier | 5a9dd2ce-c4f3-4375-8b26-d10e7a01d892 |
Record created | 2009-10-27 |
Record modified | 2023-04-17 |
- Date modified: