Depth Sensing Indentation Studies on Thin Films of Si3N4 and SiO2

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Aerospace Research
  2. National Research Council of Canada. NRC Institute for Fuel Cell Innovation
FormatText, Other
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  • unclassified/unlimited
NRC numberSMPL-1995-0050
NPARC number8931068
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Record identifier588fc0ce-8108-42a1-afc1-9e01830d30eb
Record created2009-04-23
Record modified2020-03-03
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