Design of an optimized grating coupler for thick SOI rib waveguides

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/ICO-IP.2011.5953789
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Conference2011 ICO International Conference on Information Photonics, IP 2011, 18 May 2011 through 20 May 2011, Ottawa, ON
Subjectchip coupling; coupling efficiency; grating couplers; higher-order modes; I-line steppers; optimized designs; rib waveguides; Si wire waveguide; silicon layer; single etch; thick SOI; wafer scale; optimization; photonics; silicon wafers; waveguides
Abstract
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LanguageEnglish
Peer reviewedYes
NPARC number21271481
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Record identifier532e168c-efc6-49e5-8c31-035008236f64
Record created2014-03-24
Record modified2020-04-21
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