Microstructures of reactively sputtered Ti1-xAlxNy films
Microstructures of reactively sputtered Ti1-xAlxNy films
Author | Search for: 1; Search for: 1; Search for: 1 |
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Affiliation |
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Format | Text, Article |
Conference | International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2004) From 04/19/2004 To 04/23/2004., San Diego, CA, USA |
Subject | Microstructure; Magnetron sputtering; TiAlN |
Access condition |
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Peer reviewed | Yes |
NRC number | SMPL-2003-0277 |
NPARC number | 8927170 |
Export citation | Export as RIS |
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Record identifier | 500e315b-ef3a-40f2-b80c-4ef55d740bd0 |
Record created | 2009-04-23 |
Record modified | 2020-04-16 |
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