Exposure characteristics of cobalt fluoride (CoF2) self-developing electron-beam resist on sub-100 nm scale

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.1487914
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FormatText, Article
Subjectcobalt compounds; electron energy loss spectra; electron resists; nanostructured materials; transmission electron microscopy
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LanguageEnglish
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NPARC number12328545
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Record identifier4abdb180-f750-4d41-a458-37f856e2e1d2
Record created2009-09-10
Record modified2020-04-06
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