| DOI | Resolve DOI: https://doi.org/10.1016/j.micron.2007.10.004 |
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| Author | Search for: Egerton, R. F.1; Search for: Wang, F.1; Search for: Malac, M.1; Search for: Moreno, M. S.; Search for: Hofer, F. |
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| Affiliation | - National Research Council of Canada. National Institute for Nanotechnology
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| Format | Text, Article |
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| Conference | Annual Meeting of the Microscopical Society of Canada 2007, 12-15 June 2007, Edmonton, Alberta, Canada |
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| Subject | EELS; TEM; deconvolution; Bayesian sharpening; plural scattering |
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| Abstract | We discuss how an inner-shell electron energy-loss spectrum can be processed using Bayesian (maximum-entropy or maximum-likelihood) deconvolution to simultaneously remove plural scattering and improve the energy resolution. As in Fourier-ratio deconvolution, a low-loss spectrum (recorded from the same area of specimen) is used as a kernel or resolution function. This procedure avoids the need to record the zero-loss peak in the absence of a specimen and uncertainties related to the width of the zero-loss peak. Unlike the case of Fourier-ratio deconvolution, we find that core-loss data do not require pre-edge background subtraction and extrapolation towards zero intensity; simply matching the intensity at both ends of the region is usually sufficient to avoid oscillatory artifacts. Using the low-loss spectrum as both data and kernel yields a zero-loss peak whose width provides an indication of the energy resolution as a function of the number of iterations. Finally, we argue that Fourier-ratio deconvolution or its Bayesian equivalent is the correct way to remove the substrate or matrix contribution to an energy-loss spectrum recorded from a particle on a substrate or embedded in a matrix. |
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| Publication date | 2007-10-22 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 12329204 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 4817ac00-f977-4bbf-96fe-84f2c66f1afa |
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| Record created | 2009-09-10 |
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| Record modified | 2020-05-10 |
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