Thermal oxidation of periodically aligned silicon square-spirals

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/j.mee.2008.01.050
AuthorSearch for: ; Search for: 1
Affiliation
  1. National Research Council of Canada. National Institute for Nanotechnology
FormatText, Article
ConferenceMicro- and Nano-Engineering 2007 Conference, MNE 2007, 23–27 September 2007, Copenhagen, Denmark
Abstract
Publication date
In
LanguageEnglish
Peer reviewedYes
NRC number631
NPARC number8926462
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier3a7d9bd9-4f05-48ac-8041-144c4ec2b6fd
Record created2009-04-23
Record modified2020-04-15
Date modified: